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Single Hearth Electron Beam Source

The Single Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has one (1) crucible which can accept a variety of liners. The source is designed to operate at input power levels up to 12 kW. The 270 ° bent beam design permits complete shielding of the filament from evaporated materials and falling debris. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.

FEATURES

  • Large Pocket -- Up to 40cc
  • Interchangeable Crucibles
  • 270 Bent Beam Design for Longer Filament Life
  • High Operating Efficiency
  • XY Sweep Capability

SPECIFICATIONS

Output Power

- Maximum Power

12 kW

- Emission Voltage

10 kV

- Emission Current

Up to 1.2 Amps

Efficiency

In excess of 99% of Beam Power into Hearth

Beam Characteristics

Type

270º Beam

Spot Size

0.375" x 0.375"

Sweep

Longitudinal / Lateral with Sweep Controller

Required Power

- Source

410 kV, 01.2 A

Filament

08 VAC, 40 A

Cooling Water

1.7 gpm, 45 psi Minimum

Required Operating Pressure

Below 2 x 10-4

Maximum Bake-Out Temperature

250 C

Hearth Characteristics

Material

OFHC Copper

Dimensions*

Truncated 30 Cone: 2.0" x 1.50" x 0.92"
(Top x Bottom x Depth)

Capacity

7cc to 40cc

Liner

As Required

Overall Dimensions

5.4" x 4.5" x 5.9" (HxWxL)
(137 mm X 114 mm X 149 mm)

Weight

10 lbs.

 

Our Components

New Vacuum Systems

Pre-owned Vacuum Systems

Automatic Valve Controller

Ultra E-beam Source

Feedthroughs

Single Hearth Electron Beam Source

Sweep Controller

Electron Beam Power Supplies

Sensor Heads & Crystals

Multi-Hearth Electron Beam Source

Glow Discharge Power Supply

Diffusion Pump Heaters

Yeagle Technology Inc.

140 Nott Hwy.

Ashford, CT 06278

P. 860-429-1908

F. 860-429-7176

sales@ytionline.com

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