Multi-Hearth Electron Beam Source

The Multi-Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has four (4) crucibles which can be rotated into position either manually or automatically. The source is designed to operate at input power levels up to 12 kW. The 270° bent beam design permits complete shielding of the filament from evaporated material and falling debris and protects "line of sight" to the substrates. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.

FEATURES

Four (4) Large Pockets -- Up to 40cc
Interchangeable Crucibles
Bent Beam Design for longer filament life
High Operating Efficiency
X-Y Sweep Capability

SPECIFICATIONS

Required Power	115 VAC or 230 VAC, 60 Hz
Output Power
- Maximum Power	12 kW
- Emission Voltage	10 kV
- Emission Current	Up to 1.2 Amps
Efficiency	In excess of 99% of Beam Power into Hearth
Beam Characteristics
Type	270º Beam
Spot Size	0.375" x 0.375"
Sweep	Longitudinal / Lateral with Sweep Controller
Required Power
Source	410 xV, 01.2 A
Filament	08 VAC, 40 A

Cooling Water	2 gpm, 30 psi Pressure Differential
Required Operating Pressure	Below 2 x 10-4
Maximum Bake-Out Temperature	250 C with water on
Hearth Characteristics
Material	OFHC Copper
Dimensions*	Truncated 30 Cone: 2.0" x 1.50" x 0.92" (Top x Bottom x Depth)
Capacity	Up to 40cc
Liner	As Required
Overall Dimensions	5.0" x 6.0" x 7.5" (HxWxL) (127 mm X 152 mm X 191 mm)
Weight	22.5 lbs.